Large diameter, flat design and extended functionality

The Large Ring Blade is an integral part of an automated actuator specifically designed for the handling and processing of 200 mm wafers. This particular application requires exceptional chemical resistance and electrical insulation properties. The Large Ring Blade has an exceptionally high level of flatness (less than 100 µm) and opens up new possibilities in part design. The Large Ring Blade has internal channels that facilitate efficient gas distribution or vacuum processes.

Parameter

• Application: Part of automated actuator for handling and processing of 100 mm and 200 mm wavers

• Material: Alumina 99.8 %

• Weight: 280 g

• Dimensions [mm, L*W*H]: 250x200x3.5 mm

• Technology: SLA

• Features: closed/continuous inner channel 120 mm

• Advantages: no porosity, high density, individual markings, printed in one piece